Film Thickness Measurement System FTM Series
Features
- To be measured film thickness profile of 2D.
- High speed measurement from small size to large (G11).
- For transparent film such as OC,PS, MVA, and etc.
System
from Thickness Distribution to Mura Detection
Benefit
- Improve the yield of the process
- Cut down a start loss
- Prevent the outflow of inferior goods
Specifications
| Application | A transparent film on glass, metal and silicone |
|---|---|
| Measurement System | Thickness measuring system using Optical interference of a transparent film |
| Film Thickness | 0.1 µm-10 µm *1 |
| Measurement Time | About 60sec (at G6) *1 |
| Measurement Resolution | 2 nm *1 |
| Lighting Source | White flat lighting source |
| System Function | Film thickness profile of 2D, Line profile of thickness |
*1 Depends on material of substrate and film. Please inquire with us for details.
