TSCoater (Toray Slit-nozzle Coater)
Overview
Toray's long-term success with color filter allows us to create new coating equipment and crown of the production know-how. We ,Toray Engineering, have created the ideal coater to address a pressing need of the LCD industry: coating with superior evenness.
Features
TSCoater is used in a LCD production process to apply resist uniformly to glass substrate with a slit nozzle. TSCoater is as essential as exposure in the photolithography processes of the LCD production process.
Before the introduction of TSCoater, two types of coater were used in the process: spin coater, which spin the substrate provided with resist to make uniform layer; and slit & spin coater, which is improved to apply resist with a slit nozzle before spinning. The Toray Group harnessed its film manufacturing technology to develop non-spin coater that can provide a desired thickness of resist on the substrate. The non-spin coater with slit nozzle has long been used in the manufacture of Toray color filter. In recent years, these spin-coaters hardly cope with the enlarged glass substrate: a Dilemma of the LCD industry. Toray Engineering has developed the slit-nozzle coater especially suitable for large substrates. This long-awaited coater was released in 2003 with the name “TSCoater”.
TSCoater for 6th-7th Generation Substrates (gantry drive type)
- Coating method: slit-nozzle system using gantry drive
- Substrate size: 1,500 × 1,850 mm to 1,950 × 2,250 mm
TSCoater for 8th or more Generation Substrates (gantry drive type)
- Coating method: slit-nozzle system using gantry drive
- Substrate size: 2,200 × 2,500 mm to 3,200 × 3,500 mm
Specifications
| Substrate size | 1,100 mm (W) × 1,300 mm (L) through 3,200 mm (W) × 3,500 mm (L) |
|---|---|
| Coating material | Resin black matrix, RGB, OC, PS, MVA, Posi resist, other PR |
| Coating accuracy | Within ±3 % |
| Coating method | Non-spinning slit nozzle coating |
| Tact time (reference value) | Minimum 40 seconds |
Specifications are subject to change due to product improvements.
