HS-830 Foreign Matter Inspection Device for FPDs
Overview
Like the HS-730, the first inspection device in the industry to offer sub-micron sensitivity, the HS-830 is infused with all the top-notch optical technology that we at Toray Engineering have to offer. This device enables you to detect foreign matter on glass substrate in a quarter of the time it used to take.
Features
- Allows swift, high-sensitivity inspections, e.g., 86 seconds when inspecting 1100mm × 1300mm substrate.
- New inspection system combines traditional laser scattering methods with image detection opticals to achieve a high level of inspection reliability and spatial resolution.
- High spatial resolution and review capability: high degree of foreign matter position detection precision enables review with high-magnification microscope possible—impossible with older types of inspection devices.
- High-magnification review function (total magnification up to 2000 times when converted for 14” monitor) included as standard feature.
Detection principle
Operating screen
Specifications
| Model | HS-830 |
|---|---|
| Detection method | Laser scattering imaging |
| Detection data | Number and position of foreign objects on glass, chrome or ITO substrate; SML class; foreign matter map and histogram |
| Allowable substrate size & actual inspection time (in high-speed inspection mode; sensitivity: 1µm) | 400 mm × 520 mm : 24 sec |
| 600 mm × 720 mm : 41 sec | |
| 730 mm × 920 mm : 55 sec | |
| 1100 mm × 1300 mm : 86 sec | |
| 1600 mm × 1800 mm : 144 sec | |
| Inspection sensitivity | 0.3 µm (standard particle scattering substrate) |
| Spatial resolution | 30 µm-square |
| Front/back separation capacity | 20 µm（t=1.1 mm） 16 µm（t=0.7 mm） |
| Review function | Standard feature |
Optional extras
- Loader/Unloader
- AGV/MGV
- CIM
- Simultaneous front/back inspection
- Foreign matter map comparison
