TWT Series Wafer Titlers
Overview
The TWT series is used exclusively for wafer ID marking, and can accurately mark even the most compact of areas.
Features
- Minimum code size: 200 µm-square (14 × 14 matrix code).
- High-quality code marking with superior readability.
- Code reading accuracy of at least 99.8 % when combined with Toray 2D code reader.
- Cleanness level: Complies with Class 1.
Specifications
| Wafer size | Maximum Φ300 mm |
|---|---|
| Tact time | 120 sec. (exposure: 700 pts per wafer) |
| Dimensions (W × D × H) | 1750 × 2600 × 2600 mm (Loading port, including FFU) |
| Weight | 2,000 kg |
