High-irradiance Exposure System For PSR TE2500H/TE2535H (Roll to Roll)

Features

High-irradiance (100 mW/cm², I-ray) can be obtained by 5 kW lamp source for collimated light, resulting in reduction of exposure time down to half of the standard type.
Defects normally caused by dust on mask can be minimized, owing to proximity exposure.
High-resolution (L/S = 20 µm / 20 µm) can be attained on top of the high-irradiance.
Cycle time of 6 seconds can be achieved.

Utility Requirement
	TE2500H	TE2535H
Exposure Method	Proximity Exposure
Exposure Area	260W × 280L [mm]	260W × 350L [mm]
Irradiation Method	Parabolic Mirror
Light Source	5 kW Super-High Pressure Mercury Lamp (Air Cooling)
Wave Length	300-520 nm
Irradiance	100 mW/cm²	80 mW/cm²
Irradiance Uniformity	Within ±5 %
Collimation Angle	Under 2.3 °
Declination Angle	Under 1.5 °
Resolution	L/S = 20 / 20 µm
Alignment Method	Automatic Alignment with Image Processing
Alignment Accuracy	±5 µm
Film Transfer Accuracy	±0.1mm
Cycle Time	6sec./cycle (Excluding Exposure Time)
Dimensions	Approx. 4260W × 2100D × 2050H [mm]
Weight	Approx. 4,200 [kg]
Power	3-phase, AC200 V, 10 kVA
Compressed Air	0.4 MPa, 50 NL/min.
Heat Exhaust	13 m³/min.