Hard-Contact Exposure System TE25A4
Features
- Low-cost collimated light exposure system employing hard-contact exposure
- High-resolution (L/S=10 µm/10 µm) on a 200 × 300 mm A4-sized area of rolled substrate can be attained by one-shot exposure.
Specifications
| Exposure Method | Hard-contact Exposure |
|---|---|
| Exposure Area | 200W × 200L [mm] |
| Irradiation Method | Parabolic Mirror |
| Light Source | 2 kw Super-High Pressure Mercury Lamp (Air Cooling) |
| Wave Length | 300-470 nm |
| Irradiance | 20 mW/cm2 |
| Irradiance Uniformity | Within ±5 % |
| Collimation Angle | Under 1.0 ° |
| Declination Angle | Under 1.0° |
| Resolution | L/S= 10/10 µm |
| Alignment Method | Automatic Alignment with Image Processing |
| Alignment Accuracy | ±5 µm |
| Weight | Approx. 800 [kg] |
| Utility Requirement | |
| Power | 3-phase, AC200V, 8.5kVA |
| Compressed Air | 0.4 MPa, 40 NL/min. |
| Heat Exhaust | 8 m3/min. |
Outer Appearance
