Organic Pattern Inspection System TB100/TB200
Features
- Excellent performance to distinguish between organic and inorganic substance by the unique optical system.
- Effective method to detect and locate defects on multi-layer substrate.
- High reliability to attain detailed and accurate contrast inspection of clear coating materials like ITO pattern.
Specifications
| Inspection method | 1. Fluorescent inspection 2. ITO visible inspection 3. White-light inspection (conventional method) |
|---|---|
| Inspection object size | 300mm×300mm , t=10mm |
| Resolution | 0.7µm / 1.4µm |
| Method of inspection | Scan method by line camera |
| Scan width | 2.8mm (Resolution 0.7µm） / 5.6mm（Resolution 1.4µm） |
| Scan speed | 21.9mm/s （Resolution 0.7µm） / 43.8mm/s （Resolution 1.4µm） |
Organic Pattern Inspection System TB100/TB200
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