Wafer Pattern Inspection System INSPECTRA 7000R300
Overview
- The INSPECTRA 7000R300 is a dedicated wafer front end process (e.g., etching, lithography, CMP, CVD) system, a state-of-the-art device that improves on the speed and sensitivity of the 1000EX-II series.
- Using our unique DSI algorithm (based on the DSI comparison method), the 7000R300 control a process variability and enables automatic inspections as rival visual checks for ability to detect and reduce false defects. Process monitoring throughout "all-die, all-wafer inspection" makes it possible to confirm tools and process, thus INSPECTRA 700R300 can control your quality and process.
Composition
The 7000R300 is comprised of a microscope optical system, high-resolution CCD camera, XYZ-θ stage, wafer loading/unloading robot, pre-aligner, dedicated high-speed image processor and computer. Each component is highly reliable, has minimal running costs and can be used safely in your production line. There is also a backside inspection unit optionally available.
Features
- DSI algorithm
- Easy operation
- High-speed inspection of all wafers and chips (145 wph)
- High-sensitivity inspection (minimum resolution; 0.7 µm)
- Correspond to Class 1
- Sensitivity simulation
- Non-pattern inspection
- Auto recipe creation
- Tool-to-tool recipe function
- ADC
Specifications
| Samples | Silicon semiconductors, compound semiconductors, MEMS devices |
|---|---|
| Wafer size | 200 mm, 300 mm |
| Cassettes | FOUP loading port × 2 |
| Inspection algorithm | DSI algorithm, others. |
| Inspection time | 12 sec for 300 mm wafer |
| Object lens | 1×, 2×, 5×, 10×, 20× (50× option available) |
| Standard functions | Image enhancement (LUT) Auto-focus Multi-FOV, multi-chip inspection Filtering by defect size Sensitivity simulation Ionizer |
| Utilities | 3-phase AC200V (50/60Hz) 20A |
| Dimensions | 3276 mm(W) × 1247 mm(D) × 2090 mm(H) (incl. computer rack) |
| Options | High-magnification review lens, dark field illumination, filter changer, offline review station, ADC, Backside inspection unit for all wafers |
