Roll to Roll Proximity & Hard Contact Exposure System TE2538APV/TE5000APV
Exposure method can be interchanged between hard-contact and proximity exposure
Features
- By exchanging components, the exposure method can be interchanged between hard-contact and proximity exposure.
- Both glass and film masks can be used.
- One-shot exposure over the wide and effective area (260×380 mm) is possible.
- Cycle time of 6 seconds is achieved.
- Able to achieve resolution of L/S = 10/10.