Ultrasonic proximity-drying coater system

Ultrasonic proximity-drying coater system (UPDC), developed uniquely by Toray Engineering, is a system that can sequentially perform single-substrate processing from coating to pre-baking by transferring a glass substrate in noncontact floating state. Coating unit is the air-floating coater, and drying unit after-coating is the proximity-dryer—a system with non-contact drying by heating, instead of conventional vacuum drying (reduced-pressure drying).

Features

• High Productivity: high cycle-time improves productivity, which its new glass-transfer method brings about.
• High Quality: non-contact glass-transfer eliminates drying mura and transfer mura as well as reduces particle and static electricity.
• Low Cost: robot less and vacuum pump less system reduces footprint area as well as cuts utilities and maintenance costs.
• High Potential: this system is applicable to ultra large or super thin substrates, thus enabling to develop into next generation
• Toray engineering has installed in its site a G5 test facility, which can perform these processes: washing, coating by a floating coater, non-contact heating, non-contact drying, pre-baking, exposure, development, curing (post-baking), and pattern-inspection by AOI.