Ultrasonic proximity-drying coater system
A system that can sequentially perform single-substrate processing from coating to pre-baking by transferring a glass substrate in non-contact floating state
Ultrasonic proximity-drying coater system (UPDC), developed uniquely by Toray Engineering, is a system that can sequentially perform single-substrate processing from coating to pre-baking by transferring a glass substrate in noncontact floating state. Coating unit is the air-floating coater, and drying unit after-coating is the proximity-dryer—a system with non-contact drying by heating, instead of conventional vacuum drying (reduced-pressure drying).
- High Productivity: high cycle-time improves productivity, which its new glass-transfer method brings about.
- High Quality: non-contact glass-transfer eliminates drying mura and transfer mura as well as reduces particle and static electricity.
- Low Cost: robot less and vacuum pump less system reduces footprint area as well as cuts utilities and maintenance costs.
- High Potential: this system is applicable to ultra large or super thin substrates, thus enabling to develop into next generation
- Toray engineering has installed in its site a G5 test facility, which can perform these processes: washing, coating by a floating coater, non-contact heating, non-contact drying, pre-baking, exposure, development, curing (post-baking), and pattern-inspection by AOI.
Specifications for ultrasonic proximity-drying coater system
|Applicable substrate size||0.3-0.7 (mm)|
|Application||LCD (TFT, CF), OLED, and other coating application on sheet materials|
|Coating accuracy||± 3% (excluding 15 mm area from each substrate edge)|
- Related terms
- Ultrasonic floating
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