HS-830 Foreign Matter Inspection Device for FPDs

This product has been discontinued.

High-speed inspection for contaminants on glass substrate with sub-micron sensitivity

Contaminant inspection equipment


Like the HS-730, the first inspection device in the industry to offer sub-micron sensitivity, the HS-830 is infused with all the top-notch optical technology that we at Toray Engineering have to offer. This device enables you to detect foreign matter on glass substrate in a quarter of the time it used to take.


  • Allows swift, high-sensitivity inspections,e.g., 86 seconds when inspecting 1100mm x 1300mm substrate.
  • New inspection system combines traditional laser scattering methods with image detection opticals to achieve a high level of inspection reliability and spatial resolution.
  • High spatial resolution and review capability:
    high degree of foreign matter position detection precision enables review with high-magnification microscope possible—impossible with older types of inspection devices.
  • High-magnification review function (total magnification up to 2000 times when converted for 14-inch monitor) included as standard feature.

Optional function

  • Loader/Unloader
  • CIM
  • Front/back simultaneous inspection function
  • Contaminant map comparison function

Principles of HS detection

Principles of HS detection

Principles of HS detection

Principles of HS detection

HS specifications

Model HS-830
Detection method Laser scattering imaging
Detection data Number and position of foreign objects on glass, chrome or ITO substrate; SML class; foreign matter map and histogram
Allowable substrate size
actual inspection time
(in high-speed inspection mode)
400mm × 500mm : 24sec
600mm × 720mm : 41sec
730mm × 920mm : 55sec
1100mm × 1300mm : 86sec
1500mm × 1850mm : 144sec
2200mm × 2250mm : 277sec
2950mm × 3130mm : 317sec
Inspection sensitivity 0.3 µm (standard particle scattering substrate)
Spatial resolution 30μm
Front/back separation capacity 20μm(t=1.1mm)
Review function Standard feature
  • Related terms
    • Contaminant inspection
    • Detritus inspection
    • Particle
    • Front/back separation
    • High-speed inspection
    • Sub-micron sensitivity


Technological Field
Technology >> Image processing > FPD-related Inspection Equipment