Blemish Checker for FPD NM Series

High-speed, high-precision detection and measurement of coating unevenness in liquid crystal panel color filters

Unevenness camera&lighting

Unevenness transmission and reflection isolation

Unevenness device structure

Unevenness inspection results


Detecting failures and uneven points on color resist film coated by Toray’s Coater.
Toray’s customized algorithm achieved fast throughput and high resolution.

  • High performance of detection specialized in the Mura of Toray’s coater.
  • High reliability of system. (movable part is only conveyer)
  • Fast checking speed on a par of coating speed of Toray’s Coater.


  • Improve the yield of production of Color Filter Panel
  • Cut down start losses
  • Prevent the outflow of inferior panels

NM specifications

Model NM610
Substrate Size Can support up to G10 substrate depending on the number of cameras
Application Pattern resin BM, R, G, B, OC, PS (CS)
Transparent film pre-patterning substrates
Cheking System Monochromatic CCD camera + LCD light source
Detectable MURA Mura arising from Toray'’s coater
(V-Line, H-Line, V-Mura, H-Mura, White-Pin, White-Boke, Other)
Tackt-time (Reference) 35 sec/G8 (including substrate switch-out time)
Checking Speed 300mm/sec
Outer Dimension 6000(W) × 3200(D) × 2500(H)/G8
Weight Approx. 5,000 kg
Utilities AC 220 V ± 10 %, Pressure Air, Exhaust