Measurement Principles/Maintenance Sites/Model Selection

Measurement Principles/Maintenance Sites/Model Selection

Principle of Measurement

Toray zirconia oxygen analyzers determine oxygen concentration using the conductivity of a zirconia ceramic cell. Zirconia ceramic cells only allow oxygen ions to pass through at high temperatures. With reference gas on one side and sample gas on the other, oxygen ions move from the side with the highest concentration of oxygen to that with the lowest concentration. The movement of ions generates an EMF (Electro Motive Force) which can be measured to determine the oxygen content.
This electromotive force produces a stable figure in accordance with the Nerst equation, so Toray’s zirconia sensors can measure oxygen concentration values reliably and stably.

Zirconia sensor   Nerst equation output graph

General notes on use of zirconia oxygen analyzers

Zirconia oxygen analyzers operate at high temperatures of roughly 700°C.Therefore, please be aware that the following situations may make measurement impossible or adversely affect sensor service life.

  1. Oxygen analyzers contain electrical furnaces, so they cannot be used in explosion-proof zones.
  2. If flammable gas (e.g. hydrogen, methane, alcohol, carbon monoxide) enters the oxygen analyzer it will cause a combustion reaction, and result in measurement error.
  3. Organic silica (used in sealing compounds etc.) will cause sensor degradation.(This is one extremely common cause of sensor degradation.)
  4. Halogens (especially chlorine) cause sensor failures.
  5. If substances with high calorific value such as carbon monoxide intermittently enter the oxygen analyzer the sensor will accumulate a heat history, and this will cause sensor malfunction.
  6. If large amounts of corrosive gasses such as NOX or SOX enter the oxygen analyzer it will cause sensor malfunction.
  7. At high temperatures, freon gas may break down and cause a reaction, resulting in sensor degradation.
  8. Water droplets, dust and mist will damage the sensor, shorten its service life, and cause errors.When measuring gasses containing them, remove them before passing the gas to the oxygen analyzer.Please consult with us regarding removal methods before purchasing an oxygen analyzer.

Model selection chart

Please use the chart below to help you choose the appropriate model.

Use Model Description Other options
Semiconductors, LCD, and electronic components MS-500 For mounting on systems such as semiconductor manufacturing equipment; up to 8 measurement points  
LC-450A Capable of measurement in ppm; AC power type Activated carbon filter
Si filter
Cotton filter
LC-450D Capable of measurement in ppm; DC powered
LC-860 Capable of measurement in ppb; AC powered
SD/LD-450 With vacuum chamber (to installation into systems) AC power unit: DU-450
Baking furnace, N2 reflow, and exhaust gas RF-400 Baking furnace with oxygen sensor protection; specially for reflow oven use Activated carbon filter
Si filter
Cotton filter
LC-750H/PC-111 For high and medium concentration dirty gas
Gas plant air separation LC-750H General type for high and medium concentrations
LC-750H/PC-110 General type for high and medium concentrations; built-in gas suction pump
LC-750L General type for low concentrations
LC-750L/PC-120 For low-concentration dirty gas
Vacuum deposition, closed furnaces, and gloveboxes SD/LD-450 Separate sensor and converter; thin, wall-mount converter AC power unit: DU-450
Food packaging LC-450F For sampling after gas filling (sampling probe) Activated carbon input
Head space sampler
LC-750F For sampling after gas filling (syringe)
LF-200 For installation in gas filling automatic packing machine Activated carbon filter
Cotton filter

Maintenance sites

The following sites in Japan and abroad provide maintenance services for Toray oxygen analyzers.
TDS Co., Ltd. TEL: +81-77-544-1621
1-45, Oe 1-chome, Otsu, Shiga, inside Toray Engineering Seta Plant

TEK Korea Co.,Ltd. TEL:+82-31-622-0060
Room512,10,Yatap-ro,81beon-gil,Bundang-gu,Seongnam-si.Gyeonggi-do, Korea

Shanghai TEK Technology & Consulting Co., Ltd. TEL:+ 86-21-5241-7700
Room01 36th Floor,Zhao Feng Plaza, 1027 Chang Ning Road Chang Ning Area, Shanghai 200050, China

Thales System Co.,Ltd. TEL:+886-3-657-2270
1F.,No.81,S.Sec.,Xianzheng 2nd Rd., Zhubei City,Hsinchu County 302,Taiwan (R.O.C.)

Environmental Technology Company TEL:+886-7-312-2698
16F.,No.255-2,Jiouru 2nd Rd.,Sanmin Dist.,Kaohsiung City 807,Taiwan

EQP Series Co.,Ltd. TEL:+886-2-2601-3667
No.3 Lane 6 Ren-ai Rd Sec.2 Linkou Township,Taipei County 224, Taiwan

RCLL Trading Corp. TEL+63-2-533-5565
No.28 San Roque Street, Mandaluyong City, Philippines

Citigas Co., Ltd. TEL:+66-2-920-8990
189/194 Moo. 5 Soi Liabklongbangpai, Junthongeiam Rd., T. Bangrakpattana
A. Bangbuathong, Nonthaburi 11110, Thailand

S.V. SCIENTIFIC TEL+91-80-2356-7255
No. 23/A, 2nd Floor, Serpentine Road, Kumara Park West,Bangalore 560-020, India

Jl.  Jambu 4, No.65 A RT. 02/08, Kel. Jatimulya Kec. Tambun Selatan Bekasi 17510

RKI Instruments Inc. TEL:+1-510-441-5656
33248 Central Avenue Union City, CA USA

Weatherall Equipment & Instruments Ltd TEL +44 (0)1296 622 180
Unit 1 Station Approach Wendover Bucks. HP22 6BN England

Maintenance site information

Maintenance site information


  • Tokyo office: +81-3-3241-8461

    Shiga office: +81-77-544-6224