HS-930e Foreign Matter Inspection Device for FPDsParticle Inspection System for FPD.

Fast inspection of foreign matter on glass substrate with submicron sensitivity

Particle Inspection System


By adopting our original optical technology, we achieve an inspection speed of about 30% up (compared to HS-930)
Improved the front / back judging ability to thin substrates


High speed and high sensitivity for foreign matter measurementis ia available
Example:114 sec for G6 Glass with standard sensitivity mode
• Combine the newly developed front / back determination optics with the conventional inspection principle to realize the front / back determination ability beyond HS - 930
Example: Over 1: 70 (t = 0.3 mm)
• A reviewing microscope make it possible to observe foreign matter and improves yield
• Available to from G2 to G10.5 glass size


· Simultaneous front / back side inspection function
· Foreign matter map comparison function


Model HS-930
Detection method Laser scattering imaging method
Detection sensitivity Standard sensitivity 1.0µm / high sensitivity 0.3µm (standard particle scattering substrate)
Spatial resolution 30µm
Inspection time Substrate Size Standard Sensitivity(1.0µm)Mode High Sensitivity(0.3µm)Mode
730 × 920 mm 43sec 53sec
1500 x 1850mm 114sec 141sec
2200 x 2500mm 195sec 241sec
2940 x 3370mm 333sec 410sec*1
Ability to detect front / back 1:70 or more (t = 0.3 mm)

*1 With our standard 0.3 µm particle spraying