2016-2-22

Enhancement of Intrafield Overlay Using a Design based Metrology system

• Arthur:Gyoyeon Jo
  Conference:SPIE2016
  Company:SK hynix

ABSTRACT

We are going to certify that the overlay values extracted from optical measurement cannot represent the circuit level overlay values and also, we are going to demonstrate the possibility to correct misregistration between two layers using the overlay data obtained from the DBM system.