HS-930e Foreign Particle Inspection System for PLP (Panel Level Packaging)

High-speed inspection of foreign particles on glass substrate with submicron sensitivity

Overview

High-speed, high-sensitivity inspection system applying our proprietary optical technology, with a leading market share in the display industry.

Features

  • High-speed, high-sensitivity foreign particle detection
  • Simultaneous front and back side inspection
  • Review microscope for foreign particle observation to improve yield
  • Compatible with film-coated substrates

Optional Functions

  • Loader/Unloader
  • AGV/MGV
  • CIM
HS-930e Foreign Particle Inspection System for PLP (Panel Level Packaging)

Specifications

Model HS-930e
Detection method Laser scattering imaging method
Detection sensitivity Standard: 1.0 µm / High: 0.3 µm (based on standard particle dispersion substrate)
Substrate Thickness 0.3 – 1.1 mm
Inspection time Substrate Size Standard Sensitivity Mode High Sensitivity Mode
600 × 600 mm 28 sec 31 sec