TS Coater (Toray Slit-nozzle Coater)

High-accuracy Sheet Coating Equipment with Unique Technology

Our TS Coater is widely used worldwide in various industries, including liquid crystal color filter, TFT array manufacturing process, semiconductors, and solar cell production.

Features

Handling of Large Substrates

• Capable of handling substrates up to 3,000mm (G10.5) in size
• Holds the world's #1 share in large-size slit coater

High-accuracy Coating Technology

• In-house development of key devices enables timely development and high-quality coating.
• Demonstrated #1 performance in LCD applications where uniformity and MURA (unevenness) requirements are stringent

Total Proposal from Coating to Drying

• Offers proposal of an integrated line from cleaning to coating, drying and curing
• Offers process support using our demo lines

Applications

FPD

: LCD, CF/TFT, OLED, touch panel

Solar Cells

: Perovskite Solar Cells

Semiconductors

: PLP, FOPLP, Glass Interposers

Tinting Glass

: Smart Glass, Electrochromic Glass, Functional Glass, Construction Glass, etc.

Specifications

Substrate Size	300mm×400mm〜2,940mm×3,370mm (G1〜G11size)
Material	BM, RGB, OC, PS, MVA, Posi resist, electrochromics material, polyimide material, electrode material, anode/cathode material, perovskite solar cell materials, transport layer
Method	Dispense coating material by a slit-die, stage-moving or gantry-moving
Viscosity	1〜10,000CP
Option	Air Knife, Hot Plate/ Cold Plate, Vacuum Chamber Dryer

Perovskite Solar Cell Application Examples

Smart Glass Application Examples

Semiconductor Packaging Application Examples