Measuring & Analysis Equipment
Quality management for semiconductor manufacturing processes and liquid crystal panel manufacturing processes, which require nano-order precision. Oxygen analyzers used in firing furnaces and N2 reflow ovens.Water quality meters used to monitor the water quality of plant discharge and the pure water used in semiconductor manufacturing processes.Our measuring and analysis equipment is used in a wide range of fields.
Semiconductor inspection equipment
We have a full line-up of inspection systems for the semiconductor production process. All of these systems have earned an outstanding reputation on the production line for their high reliability, ease of operation and minimal running cost.
- Wafer inspection system "INSPECTRA®" series
- Wafer Internal Inspection System "INSPECTRA® IR" Series
- Chip Inspection System GEN3000T
- Review System "RV-3000"
- Luminescence Defect Inspection System "INSPECTRA® PL" Series
- Overlay measurement system "OM-7000"
- Discontinued Products (Semiconductor inspection equipment)
FPD Inspection Equipment
Inspection equipment employing Toray Engineering’s unique optical technology—including foreign matter inspection devices and surface profilers—have won the trust of customers on the LCD, OLED and PDP inspection site where high accuracy is required.
Our diverse product lineup includes high-accuracy, high-reliability gas analyzers for everything from semiconductors and electronic components, to environmental equipment and food packaging.
- Measurement Principles/Maintenance Sites/Model Selection
- For Semiconductors, LCD, and Electronic Components
- For Baking Furnaces, N2 Reflow Ovens, and Dirty Gas
- For Gas Plants and Air Separating Devices
- For Vacuum Deposition, Closed Furnaces, and Gloveboxes
- For Food Packaging Products
- Discontinued Products (oxygen analyzers)
- Notice concerning oxygen analyzers
Water Quality Analyzers
From water pollution in rivers, lakes, marshes, sea areas and factory wastewater... to monitoring ultrapure water used in processes such as semiconductor manufacturing... Toray Engineering has a comprehensive lineup of automatic water quality analyzers.
- Total Organic Carbon (TOC) Automatic AnalyzerNEW
- Total Phosphorous/Nitrogen (TP/TN) Automatic AnalyzerNEW
- Automatic Total Oxygen Demand (TOD) Analyzers
- Automatic UV Analyzers
- Total Nitrogen (TN) Automatic Analyzer
- Automatic Total Organic Carbon/Total Nitrogen Analyzers (TOC/TN)
- Desktop TOC Analyzer (for laboratory use)
- High Sensitivity TOC Automatic Analyzer (for ultrapure water)
- Discontinued Products (water quality analyzers)
Fluid Processing Devices
Toray Engineering uses its advanced technologies to provide production process management and control of chemicals and synthetic fiber equipment, precision measuring devices for determining liquid properties such as density and viscosity, and material control devices for fluid mixing and other processes.