Oxygen AnalyzersOxygen Analyzer for Semiconductors, Electronic Components
MS-500, LC-450A, LC-450D, LC-860
Model: MS-500
- Capable of measuring up to 8 points simultaneously
- Displays wide range of concentrations, from ppm level to 100%
- Best for mounting in semiconductor manufacturing equipment, vacuum equipment, etc.
- Direct insertion type sensor (NW 16/25/40 flange for vacuum )
- Special coating used on high durable sensors for greater durability
MS-500 specifications
| Measurement principle | Zirconia concentration cell type | ||
|---|---|---|---|
| Type | Separate-type (converter: wall-mounted; sensor: direct insertion type) | ||
| Display system | 4-digit digital display (concentration display) | ||
| Measurement range | 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2 10-20～10-0atm Automatic range |
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| Repeatability | Within ±0.5% of full scale; range of 0-1% or more
Within ±1% of full scale or ±0.1 ppm, whichever is larger; range of less than 0-1% Concentrations in the 0-1 ppm, atm range are out of warranty. |
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| Number of measurement points | 1～8 | ||
| Sample gas requirements | Pressure | 10-3to 200KPa (absolute pressure) | |
| Flow rate | 0.5 to 5,000 mL/min or 0 mL/min (measurement in state of natural dispersion) | ||
| Humidity | Dew point below ambient temperature | ||
| Temperature | 0 to 100°C | ||
| Others | Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture | ||
| Reference gas | Atmosphere | ||
| Recorder output | Transmission output only | ||
| Transmission output | RS-232C | ||
| Alarm output | None | ||
| Warmup time | 6 minutes or less | ||
| Dimensions | MS-500(controller) | 92 mm (W) ×44 mm (H)×120 mm (D) (excluding projecting parts) | |
| MS-510(converter) | 100 mm (W) ×40 mm (H)×88 mm (D) (excluding projecting parts) | ||
| Sensor unit | SD16NW | Overall length 100mm(sensor ⌀ 11×39,body ⌀ 40×51) | |
| SD25NW | Overall length 100mm(sensor ⌀ 11×42,body ⌀ 40×48) | ||
| SD40NW | Overall length 100mm(sensor ⌀ 11×41,body ⌀ 40×49) | ||
| Weight | MS-500(controller) | Approx. 0.6 kg | |
| MS-510(converter) | Approx. 0.5 kg | ||
| Sensor unit | SD16NW | Approx. 0.2 kg | |
| SD25NW | Approx. 0.2 kg | ||
| SD40NW | Approx. 0.35 kg | ||
| External connection | Any of the vacuum flanges (NW16, 25, or 40) | ||
| Power | 24VDC±10% | ||
Model: LC-450A/LC-450D
- Measurement across a wide range of concentrations
Capable of displaying a wide range of concentrations, from ppm level to 100% - Improved sensor durability
Special coating used on oxygen sensor for greater durability - Wide AC power range AC100～240VAC(LC-450A)
* DC 24 V power used for LC-450D - Compact and easy to install
Shorter depth than conventional devices. Save space. - RoHS compliant
- CE marking declaration of conformity
EN61010-1:2002，EN61326:+A3:2003
LC-450A specifications
| Measurement principle | Zirconia concentration cell type | ||
|---|---|---|---|
| Type | Desktop type/panel mounted type | ||
| Display system | 4-digit digital display (concentration display) | ||
| Measurement range | 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2 10-20～10-0atm Automatic range | ||
| Repeatability | Concentrations in the range ±1% of full scale and 0-1 ppm, atm are out of warranty. | ||
| Sampling method | Continuous suction with built-in pump | ||
| Sample gas requirements | Pressure | Pressurization of 30 KPa or less | |
| Flow rate | 1,000～2,000mL/min | ||
| Humidity | Dew point below ambient temperature | ||
| Temperature | 0 to 50°C | ||
| Others | Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture | ||
| Reference gas | Atmosphere | ||
| Recorder output | Oxygen concentration output | Switch between 4-20 mA or 0-20 mA (0-10 V is optional); insulated; load resistance of 550 Ω or less Recorder output range taken as full scale and oxygen concentration given in linear output |
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| Output range | 0-100%, 0-1000ppm, 0-100ppm, 0-10ppm Automatic/fixed range | ||
| Transmission output | RS-232C | ||
| Alarm output | FAIL (device error) | 1 point | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less Contact point closes when device error occurs (contact point operation adjustable) |
| ALM (concentration alarm) | 2 points (H/L) | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less Contact point closes when alarm occurs (contact point operation adjustable) |
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| RDY (warmup signal) | 1 point | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
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| MRK (range marker) output | 2 points | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less | |
| Warmup time | 5 minutes or less | ||
| Dimensions | Body | 210 mm (W) ×134 mm (H)×300 mm (D) (excluding projecting parts) | |
| Weight | Approx. 6 kg | ||
| Gas connection | INLET | Rc1/4 | |
| BYPASS OUT | Rc1/4 | ||
| OUTLET | Rc1/4 | ||
| Power | 100 to 240 V AC, 50 V A (normal conditions: 35 V A) 50 Hz/60 Hz | ||
LC-450D specifications
| Measurement principle | Zirconia concentration cell type | ||
|---|---|---|---|
| Type | Desktop type/panel mounted type | ||
| Display system | 4-digit digital display (concentration display) | ||
| Measurement range | 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2 10-20～10-0atm Automatic range | ||
| Repeatability | Concentrations in the range ±1% of full scale and 0-1 ppm, atm are out of warranty. | ||
| Sampling method | Continuous suction with built-in pump | ||
| Sample gas requirements | Pressure | Pressurization of 30 KPa or less | |
| Flow rate | 1,000～2,000mL/min | ||
| Humidity | Dew point below ambient temperature | ||
| Temperature | 0 to 50°C | ||
| Others | Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture | ||
| Reference gas | Atmosphere | ||
| Recorder output | Oxygen concentration output | 0-10 V DC; insulated; load resistance of 600 kΩ or more (Option: 4-20 mA DC; insulated; load resistance of 550 Ω or less) Recorder output range taken as full scale and oxygen concentration given in linear output |
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| Output range | 0-100%, 0-1000ppm, 0-100ppm, 0-10ppm Automatic/fixed range | ||
| Transmission output | RS-232C | ||
| Alarm output | FAIL (device error) | 1 point | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less Contact point closes when device error occurs (contact point operation adjustable) |
| ALM (concentration alarm) | 2 points (L/LL) | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less Contact point closes when alarm occurs (contact point operation adjustable) |
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| RDY (warmup signal) | 1 point | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less Contact point closes during warmup (contact point operation adjustable)
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| MRK (range marker) output | 2 points | Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less | |
| Warmup time | 5 minutes or less | ||
| Dimensions | Body | 240 mm (W) ×134 mm (H)×210 mm (D) (excluding projecting parts) | |
| Weight | Approx. 5 kg | ||
| Gas connection | INLET | Rc1/8 | |
| BYPASS OUT | Rc1/8 | ||
| OUTLET | Rc1/8 | ||
| Power | 24 V DC±10%, 1.25 A (30 V A under normal conditions) | ||
Model: LC-860
- Low concentration measurement
Measurement range from ppb level to 100% - Easy to operate
Easy operation by separate keys. - Purge function
The more precious measurement is possible by stablizing the reference gas. (for models with purge function only) - High reliability sensor
Processing to prevent from degradation for the sensor is available (option).
LC-860 specifications
| Measurement principle | Zirconia concentration cell type | ||
|---|---|---|---|
| Type | Desktop type/panel mounted type | ||
| Display system | 6-digit digital display (concentration display) | ||
| Measurement range | 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2 10-20～10-0atm Automatic/fixed range |
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| Repeatability | Within ±1% of full scale Oxygen concentrations of less than 1 ppm and concentrations in the 0-1 ppm, atm range are out of warranty. |
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| Sampling method | Continuous suction with built-in pump | ||
| Sample gas requirements | Pressure | Pressurization of 30 KPa or less | |
| Flow rate | ～1,500mL/min | ||
| Humidity | Dew point below ambient temperature | ||
| Temperature | 0 to 50°C | ||
| Others | Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture | ||
| Reference gas | Atmosphere | ||
| Recorder output | Oxygen concentration output | 4-20 mA/0-10 V 4-20 mA: insulated; load resistance of 600 Ω or less 0-10 V: insulated; load resistance of 500 Ω or more Recorder output range taken as full scale and oxygen concentration given in linear output |
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| Output range | 0-100%, 0-10%, 0-1%, 0-1000ppm, 0-100ppm, 0-10ppm, 0-1ppm, 10-20-10-0 or Automatic/fixed range with arbitrary 4 ranges | ||
| Transmission output | RS-232C | ||
| Alarm output | FAIL (device error) | 1 point | Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.1 A or less Contact point closes when device error occurs (contact point operation is adjustable) |
| ALM (concentration alarm) | 2 points | Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.1 A or less Contact point closes when alarm occurs (contact point operation is adjustable) |
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| RDY (warmup signal) | 1 point | Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.5 A or less Contact point closes during warmup (contact point operation is adjustable)
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| MRK (range marker) output | 3 points | Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.1 A or less | |
| Warmup time | 20 minutes or less | ||
| Dimensions | Body | 288 mm (W) ×144 mm (H)×400 mm (D) (excluding projecting parts) | |
| Weight | Approx. 10 kg | ||
| Gas connection | INLET | Rc1/8 | |
| BYPASS OUT | Rc1/8 | ||
| OUTLET | Rc1/4 | ||
| Power | 100 to 120 V AC±10% 200 V A 50 Hz/60 Hz | ||
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