Oxygen AnalyzersOxygen Analyzers for Semiconductors and Electronic components, Display

LD-600, LD-450, MS500/510, LC-450(A)(D), LC-860, RF-400-01

Model: LD-600/SD sensor

LD-600/SD sensor

  • EtherCAT communication is possible.
    It is ideal for integration into devices and applications that use EtherCAT communication.
  • Space-saving installation is possible.
    The separation of the oxygen sensor and the thin transducer significantly reduces the constraints on installation location.
  • Suitable for vacuum atmospheres
    This direct-insertion sensor requires no sampling and can perform measurements even in a vacuum atmosphere.
  • Ultra-fast response
    We achieve the shortest response time with separate sensors.
  • High-durability sensor
    The sensor has been treated with a special coating to achieve high durability.
  • Applicable Standards
    CE Marking: EN 61010-1, EN 61326-1
    RoHS Directive: EN 63000
  • Trade name
    EtherCAT® logo
    EtherCAT® is a patented technology licensed and registered trademark from Beckhoff Automation GmbH (Germany).

LD-600/SD sensor specifications

Type Separate type (converter: fixed/wall-mounted, sensor: direct insertion type)
Display No display
Floating-point output in ppm units
Sensor connection ISO vacuum flange NW16, 25, 40 or R3/8 thread
Connection The connection between the converter and the sensor is made via a dedicated cable;
the standard length is 2m, with a maximum length of 10m.
Reference gas Atmosphere
Mass Converter LD-600: Approximately 0.8 kg
sensor SD16NW: approx. 0.2kg
SD25NW: approx. 0.2kg
SD40NW: approx. 0.35kg
External dimensions Converter LD-600: 65 (W) x 130 (H) x 125 (D)
(Units: mm, excluding protrusions)
sensor SD16NW: Total length 100mm (sensing part φ11×39, body part φ40×51)
SD25NW: Total length 100mm (sensing part φ11×42, body part φ40×48)
SD40NW: Total length 100mm (sensing part φ11×41, body part φ40×49)
(Units: mm, excluding protrusions)
Note: The sensor unit will be one of the following, SD16NW/SD25NW/SD40NW, as specified by the customer for each detection part.
Repeatability For ranges above 0-1%: ±0.5%FS or less. For ranges below 0-1%: ±1.0%FS or ±0.1ppm, whichever is greater.
*Ranges below 0-1ppm are not guaranteed.
Aerial point stability ±1%FS or less/24hr
Warm-up time Within 6 minutes
Communication output specifications Communication method: EtherCAT I/F (ETG 5003.1, ETG 5003.2 compliant)
Profile: Common device profile
Protocol: ETG 5003.1 CDP compatible (CoE, FoE)
Sample gas conditions Do not use in a reducing atmosphere. Also, it may not be usable if the specific heat of the measured gas is high, such as with high concentrations of helium (He).
Specifications: Temperature: 0–100°C
; Pressure: 10⁻³ Pa –200 kPa (absolute pressure)
; Humidity: Dew point below ambient temperature;
Flow rate: 0.5–5 L/min or 0 L/min (measurement under natural diffusion conditions)
Warm-up time Within 6 minutes
power supply Power supply: DC24V, 3A
Power consumption: 80VA (steady state: 30VA)
Installation conditions Installation location: Indoors, in a non-explosion-proof area.
Ambient temperature: Converter: 0-40°C,
Sensor unit: 0-50°C.
Ambient humidity: 35-80%RH (non-condensing).
Installation temperature: Converter: 0-40°C,
Sensor unit: 0-100°C.
Must not contain flammable components, halogens, silica, or corrosive components.

Model: LD-450/SD sensor

LD-450/SD sensor

  • Flexible setup layout. The oxygen sensor and low-profile converter are separated, greatly relaxing limitations on where the device can be installed.
  • Space saving. The newly developed low-profile wall mounted converter eliminates concerns about the device’s depth.
  • Ultra-high-speed response. The separated sensor provides the fastest response speed.
  • Highly durable sensor. A special coating is used for even greater durability.
  • Applicable Standards
    CE Marking: EN 61010-1, EN 61326-1
    RoHS Directive: EN 63000
    Applications
    Sputtering systems; equipment gas purity management; factory piping argon (Ar) welding management; experimental equipment; and testing equipment.
  • Sensors are compatible with NW flanges (16, 25, 40) for vacuum and screw-in units (3/8R).Select the appropriate type for use condition.

Installation example (SD sensor and LD-450 converter work in pairs.)

LD-450/SD sensor specifications

Measurement principle Zirconia concentration cell type
Type Separate-type (converter: wall-mounted; sensor: direct insertion type)
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2　10-20～10-0atm
Automatic/fixed range
Repeatability Within ±0.5% of full scale; range of 0-1% or more
Within ±1% of full scale or ±1ppm, whichever is larger; range of less than 0-1%
Concentrations in the 0-1 ppm, atm range are out of warranty.
Sample gas requirements
 Pressure 10-3 to 200 KPa (absolute pressure)
Flow rate 0.5 to 5,000 mL/min or 0 mL/min (measurement in state of natural dispersion)
Humidity Dew point below ambient temperature
Temperature 0 to 100°C
Others Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture
Reference gas Atmosphere
Recorder output Oxygen concentration output 4-20m (choice between this and transmission output)
Insulated; load resistance of 550 Ω or less
Recorder output range taken as full scale, and oxygen concentration given in linear output
Output range 0-100%, 0-1000ppm, 0-100ppm, 0-10ppm　Automatic/fixed range
Transmission output RS-232C(choice between this and analog output)
Alarm output FAIL (device error) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when device error occurs (contact point operation is adjustable)
ALM (concentration alarm) 4 points (HH/H/L/LL) Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when alarm occurs (contact point operation is adjustable)
RDY (warmup signal) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
  • Minimum open/close capacity of the non-voltage contact point is 12 V or higher; does not respond to extremely small loads
MRK (range marker) output 2 points Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.3 A or less
Warmup time 6 minutes or less
Dimensions Converter 185 mm (W) ×155 mm (H)×40 mm (D)　 (excluding projecting parts)
Sensor unit SD3/8R Overall length 100mm(sensor ⌀ 11×37,body ⌀ 40×48.5)
SD16NW Overall length 100mm(sensor ⌀ 11×39,body ⌀ 40×51)
SD25NW Overall length 100mm(sensor ⌀ 11×42,body ⌀ 40×48)
SD40NW Overall length 100mm(sensor ⌀ 11×41,body ⌀ 40×49)
Weight Converter Approx. 1.2 kg　　
Sensor unit Approx. 0.5 kg
External connection Vacuum flange (NW16, 25, or 40) or R3/8 screw
Power 24 V DC±10%, 60 V A (normal: 15 V A or less)

Model: MS-500/MS-510/SD sensor

MS-500/MS-510/SD sensor

  • Capable of measuring up to 8 points simultaneously
  • Displays wide range of concentrations, from ppm level to 100%
  • Best for mounting in semiconductor manufacturing equipment, vacuum equipment, etc.
  • Direct insertion type sensor (NW 16/25/40 flange for vacuum )
  • Special coating used on high durable sensors for greater durability
  • Applicable Standards
    CE Marking: EN 61010-1, EN 61326-1
    RoHS Directive: EN 63000

MS-500/MS-510/SD sensor specifications

Measurement principle Zirconia concentration cell type
Type Separate-type (converter: wall-mounted; sensor: direct insertion type)
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2　10-20～10-0atm
Automatic range
Repeatability Within ±0.5% of full scale; range of 0-1% or more
Within ±1% of full scale or ±0.1 ppm, whichever is larger; range of less than 0-1%
Concentrations in the 0-1 ppm, atm range are out of warranty.
Number of measurement points 1～8
Sample gas requirements Pressure 10-3to 200KPa (absolute pressure)
Flow rate 0.5 to 5,000 mL/min or 0 mL/min (measurement in state of natural dispersion)
Humidity Dew point below ambient temperature
Temperature 0 to 100°C
Others Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture
Reference gas Atmosphere
Recorder output Transmission output only
Transmission output RS-232C
Alarm output None
Warmup time 6 minutes or less
Dimensions MS-500(controller) 92 mm (W) ×44 mm (H)×120 mm (D)　 (excluding projecting parts)
MS-510(converter) 100 mm (W) ×40 mm (H)×88 mm (D)　 (excluding projecting parts)
Sensor unit SD16NW Overall length 100mm(sensor ⌀ 11×39,body ⌀ 40×51)
SD25NW Overall length 100mm(sensor ⌀ 11×42,body ⌀ 40×48)
SD40NW Overall length 100mm(sensor ⌀ 11×41,body ⌀ 40×49)
Weight MS-500(controller) Approx. 0.6 kg
MS-510(converter) Approx. 0.5 kg
Sensor unit SD16NW Approx. 0.2 kg
SD25NW Approx. 0.2 kg
SD40NW Approx. 0.35 kg
External connection Any of the vacuum flanges (NW16, 25, or 40)
Power 24VDC±10%

Model: LC-450A/LC-450D

LC-450A, LC-450D

  • Measurement across a wide range of concentrations
    Capable of displaying a wide range of concentrations, from ppm level to 100%
  • Improved sensor durability
    Special coating used on oxygen sensor for greater durability
  • Wide AC power range　AC100～240VAC(LC-450A)
    * DC 24 V power used for LC-450D
  • Compact and easy to install
    Shorter depth than conventional devices. Save space.
  • Applicable Standards
    Safety：CE, UKCA- EN 61010-1
    EMC: CE-EN61326-1
    RoHS Directive: EN 63000

LC-450A specifications

Measurement principle Zirconia concentration cell type
Type Desktop type/panel mounted type
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2　10-20～10-0atm 　Automatic range
Repeatability Concentrations in the range ±1% of full scale and 0-1 ppm, atm are out of warranty.
Sampling method Continuous suction with built-in pump
Sample gas requirements Pressure Pressurization of 30 KPa or less
Flow rate 1,000～2,000mL/min
Humidity Dew point below ambient temperature
Temperature 0 to 50°C
Others Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture
Reference gas Atmosphere
Recorder output Oxygen concentration output Switch between 4-20 mA or 0-20 mA (0-10 V is optional); insulated; load resistance of 550 Ω or less
Recorder output range taken as full scale and oxygen concentration given in linear output
Output range 0-100%, 0-1000ppm, 0-100ppm, 0-10ppm　Automatic/fixed range
Transmission output RS-232C
Alarm output FAIL (device error) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when device error occurs (contact point operation adjustable)
ALM (concentration alarm) 2 points (H/L) Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when alarm occurs (contact point operation adjustable)
RDY (warmup signal) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
  • Minimum open/close capacity of the non-voltage contact point is 12 V or higher; does not respond to extremely small loads
MRK (range marker) output 2 points Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Warmup time 5 minutes or less
Dimensions Body 210 mm (W) ×134 mm (H)×300 mm (D) (excluding projecting parts)
Weight Approx. 6 kg
Gas connection INLET Rc1/4
BYPASS OUT Rc1/4
OUTLET Rc1/4
Power 100 to 240 V AC, 50 V A (normal conditions: 35 V A) 50 Hz/60 Hz

LC-450D specifications

Measurement principle Zirconia concentration cell type
Type Desktop type/panel mounted type
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2　10-20～10-0atm 　Automatic range
Repeatability Concentrations in the range ±1% of full scale and 0-1 ppm, atm are out of warranty.
Sampling method Continuous suction with built-in pump
Sample gas requirements Pressure Pressurization of 30 KPa or less
Flow rate 1,000～2,000mL/min
Humidity Dew point below ambient temperature
Temperature 0 to 50°C
Others Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture
Reference gas Atmosphere
Recorder output Oxygen concentration output 0-10 V DC; insulated; load resistance of 600 kΩ or more
(Option: 4-20 mA DC; insulated; load resistance of 550 Ω or less)
Recorder output range taken as full scale and oxygen concentration given in linear output
Output range 0-100%, 0-1000ppm, 0-100ppm, 0-10ppm　Automatic/fixed range
Transmission output RS-232C
Alarm output FAIL (device error) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when device error occurs (contact point operation adjustable)
ALM (concentration alarm) 2 points (L/LL) Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when alarm occurs (contact point operation adjustable)
RDY (warmup signal) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes during warmup (contact point operation adjustable)
  • Minimum open/close capacity of the non-voltage contact point is 12 V or 20 mA or higher; does not respond to extremely small loads
MRK (range marker) output 2 points Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Warmup time 5 minutes or less
Dimensions Body 240 mm (W) ×134 mm (H)×210 mm (D) (excluding projecting parts)
Weight Approx. 5 kg
Gas connection INLET Rc1/8
BYPASS OUT Rc1/8
OUTLET Rc1/8
Power 24 V DC±10%, 1.25 A (30 V A under normal conditions)

Model: LC-860

LC-860

  • Low concentration measurement
    Measurement range from ppb level to 100%
  • Easy to operate
    Easy operation by separate keys.
  • Purge function
    The more precious measurement is possible by stablizing the reference gas. (for models with purge function only)
  • High reliability sensor
    Processing to prevent from degradation for the sensor is available (option).
  • Applicable Standards
    Safety：CE- EN 61010-1
    EMC: CE-EN61326-1
    RoHS Directive: EN 63000

LC-860 specifications

Measurement principle Zirconia concentration cell type
Type Desktop type/panel mounted type
Display system 6-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2　10-20～10-0atm
Automatic/fixed range
Repeatability Within ±1% of full scale
Oxygen concentrations of less than 1 ppm and concentrations in the 0-1 ppm, atm range are out of warranty.
Sampling method Continuous suction with built-in pump
Sample gas requirements Pressure Pressurization of 30 KPa or less
Flow rate ～1,500mL/min
Humidity Dew point below ambient temperature
Temperature 0 to 50°C
Others Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture
Reference gas Atmosphere
Recorder output Oxygen concentration output 4-20 mA/0-10 V
4-20 mA: insulated; load resistance of 600 Ω or less
0-10 V: insulated; load resistance of 500 Ω or more
Recorder output range taken as full scale and oxygen concentration given in linear output
Output range 0-100%, 0-10%, 0-1%, 0-1000ppm, 0-100ppm, 0-10ppm, 0-1ppm, 10-20-10-0　or Automatic/fixed range with arbitrary 4 ranges
Transmission output RS-232C
Alarm output FAIL (device error) 1 point Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.1 A or less
Contact point closes when device error occurs (contact point operation is adjustable)
ALM (concentration alarm) 2 points Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.1 A or less
Contact point closes when alarm occurs (contact point operation is adjustable)
RDY (warmup signal) 1 point Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.5 A or less
Contact point closes during warmup (contact point operation is adjustable)
  • Minimum open/close capacity of the non-voltage contact point is 12 V or higher; does not respond to extremely small loads
MRK (range marker) output 3 points Non-voltage contact; contact capacity: 24 V DC/AC or less, 0.1 A or less
Warmup time 20 minutes or less
Dimensions Body 288 mm (W) ×144 mm (H)×400 mm (D) (excluding projecting parts)
Weight Approx. 10 kg
Gas connection INLET Rc1/8
BYPASS OUT Rc1/8
OUTLET Rc1/4
Power 100 to 120 V AC±10% 200 V A 50 Hz/60 Hz

Model: RF-400-01

RF-400-01

  • New particle filter　
    Replaceable without removing the oxygen analyzer from the device
  • Special filter
  • Improves oxygen sensor durability
  • Wide AC range
    Supports 100 V to 240 V AC power
  • Convenient measurement range
    Measurement range of 0 to 10,000 ppm, commonly used in nitrogen reflow systems (0–1% range is also selectable)
  • Compact and easy to install
    Shorter depth than conventional devices. Save space.
  • Applicable Standards
    Safety：CE, UKCA- EN 61010-1
    EMC: CE-EN61326-1
    RoHS Directive: EN 63000

RF-400-01 specifications

Measurement principle Zirconia concentration cell type
Type Desktop type/panel mounted type
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000 / 10000ppm(1) / 10 / 100vol%O2　10-20～10-0atm
Automatic range
Repeatability Within ±1% of full scale; 1%≦ sample gas ≦100%
Within ±2% of full scale; 10 ppm≦ sample gas ≦1%
Concentrations under 10 ppm are out of warranty.
Sampling method Continuous suction with built-in pump
Sample gas requirements Pressure Pressurization of 30 KPa or less
Flow rate 1,000～2,000mL/min
Humidity Dew point below ambient temperature
Temperature 0 to 50°C
Others Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture
Reference gas Atmosphere
Recorder output Oxygen concentration output 4-20mA; insulated,load resistance of 550 Ω or less
Recorder output range taken as full scale, and oxygen concentration given in linear output
Output range 0-100%, 0-10%, 10000ppm, 0-100ppm, 0　Automatic/fixed range
Transmission output RS-232C
Alarm output FAIL (device error) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when device error occurs (contact point operation is adjustable)
ALM (concentration alarm) 2 points (H/L) Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
Contact point closes when alarm occurs (contact point operation is adjustable)
RDY (warmup signal) 1 point Non-voltage contact; contact capacity: 30 V DC/AC or less, 0.5 A or less
  • Minimum open/close capacity of the non-voltage contact point is 12 V or higher; does not respond to extremely small loads
Warmup time 5 minutes or less
Dimensions Body 210 mm (W) ×134 mm (H)×300 mm (D)(excluding projecting parts and filter)
Weight Approx. 6.5 kg
Gas connection INLET Rc1/4
BYPASS OUT Rc1/4
OUTLET Rc1/4
Power 100 to 240 V AC±5%, 200 V A 50 Hz/60 Hz±2%

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